Applications in semiconductor industry Ultrapure water

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ultrapure water used extensively in semiconductor industry; highest grade of upw quality. consumption semiconductor industry can compared water consumption of small city; single factory can utilize high-purity water @ rate of 2 mgd, or ~5500 m/day. use of upw varies; may used rinse wafer after application of chemicals, dilute chemicals themselves, in optics systems immersion photolithography, or make-up cooling fluid in critical applications. upw used humidification source cleanroom environment.


the primary, , critical, application of upw in front-end cleaning tools, when foundation of integrated circuit created. use cleaning , etching agent, impurities can cause product contamination or impact process efficiency (e.g. etch rate) must removed water. in chemical-mechanical polishing processes, water used in addition reagents , abrasive particles.


water quality standards use in semiconductor industry



it used in other types of electronics manufacturing in similar fashion, such displays, discrete components (such leds), , crystalline silicon photovoltaics; cleanliness requirements in semiconductor industry, however, stringent.








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