Point of use .28POU.29 treatment for organics Ultrapure water

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vanox system point-of-use ultrapure water treatment systems


point of use treatment applied in critical tool applications such immersion lithography , mask preparation in order maintain consistent ultrapure water quality. upw systems located in central utilities building provide fab quality water may not provide adequate water purification consistency these processes.


in case when urea, thm, isopropyl alcohol (ipa) or other difficult remove (low molecular weight neutral compounds) toc species may present, additional treatment required thru advanced oxidation process (aop) using systems. particularly important when tight toc specification below 1 ppb required attained. these difficult control organics have been proven impact yield , device performance @ demanding process steps. 1 of successful examples of pou organics control down 0.5 ppb toc level aop combining ammonium persulfate , uv oxidation (refer persulfate+uv oxidation chemistry in toc measurement section).


available proprietary pou advanced oxidation processes can consistently reduce toc 0.5 parts per billion (ppb) in addition maintaining consistent temperature, oxygen , particles exceeding semi f063 requirements. important because slightest variation can directly affect manufacturing process, influencing product yields.








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